Micro & Nano 2010 : 4th Intern. conf. on micro-nanoelectronics, nanotechnologies & MEMs, Dec. 12-15, 2010, Athens, Greece / International conference on micro-nanoelectronics, nanotechnologies & MEMs (4th; 2010; Athens), 2012. - IX, 172 p. - Текст : непосредственный.