Zhan Q. Measurement of surface features beyong the diffraction limit using an imaging ellipsometer / Q.Zhan,R.Leger, 2002. - 13 p. - Текст : непосредственный.
Zhan Q. Imaging ellipsometry high-spatial-resolution metrology / Q.Zhan,R.Leger, 2002. - 12 p. - Текст : непосредственный.