Полное описание

Forschungszentrum(Karlsruhe).
Wissenschaftliche Berichte : дис. ... / FZKA. - Karlsruhe. - 19 - . - Текст : непосредственный.
7308 : Goldgalvanik in der Mikrosystemtechnik. Herausforderungen durch neue Anwendungen : Diss. / N. Dambrowsky, J. Schulz. - Karlsruhe, 2007. - IV, 112 S. : Ill. - Библиогр.: с. 99-109

ГРНТИ	УДК
55.22.19	621-181.4(043)

Рубрики:
Миниатюрные изделия -- Гальванические покрытия

Аннотация: This thesis presents a broad development in materials and electrolytes to approach new fields of applications for sulfitic gold electroplating within the LIGA micro patterning process. Limiting factors in processing X-ray mask absorbers, such as critical dimension, maximum structure height, covering capacity, and layer thickness homogeneity, were improved. The application of outstanding properties of gold, including its very high conductivity, high ductility, excellent corrosion resistance, and unlimited potential to form alloys, could therefore be extended beyond mask absorbers, e.g. to metallic parts in micro optics, micro fluidics, and micro mechanics. New requirements with respect to materials properties and the fabrication process were met by an analysis and evaluation of various parameters and control variables of the sulphite gold electrolyte while applying fundamental considerations in materials science.
Доп. точки доступа:
Schulz, J.
Forschungszentrum(Karlsruhe)

Имеются экземпляры в отделах: всего -20071028 : ХР (-20071029), (1)
Свободны: ХР (1), (1)
Копия:

Держатели документа:
Государственная публичная научно-техническая библиотека России : 123298, г. Москва, ул. 3-я Хорошевская, д. 17 (Шифр в БД-источнике (KATBW): R/17669/7308)

Шифр в сводном ЭК: 188bc53f20469cd563b7a4d32d9eae19

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