NATO science series. Sub-ser.II, Mathematics, physics and chemistry. Vol. 181 : Smart sensors and MEMS : proc. of the NATO advanced study inst. on smart sensors a. MEMS, Povoa de Varzim, Portugal, 8-19 Sept., 2003 / Ed.: S.Y.Yurish, M.T.Gomes, 2004. - XV,480 p. - Текст : непосредственный.