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621.315.592.9/S38-099960
Schubert, M. Infrared ellipsometry on semiconductor layer structures : phonons, plasmons, and polaritons / M. Schubert. - Electronic text data. - Berlin ; Heidelberg : Springer, 2005. - (Springer tracts in modern physics, ISSN 0081-3869 ; 209). - URL: http://dx.doi.org/10.1007/b11964. - ISBN 3-540-23249-4.

ГРНТИ	УДК
47.01.77	621.315.592.9

Кл.слова (ненормированные): полупроводниковые структуры -- инфракрасная эллипсометрия
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Экз-ры полностью 621.315.592.9/S38-099960
http://dx.doi.org/10.1007/b11964

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