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621.382.004.6/D30-567685
Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices / ed. E. Gusev. - Electronic text data. - Dordrecht : Springer, 2006. - (NATO science series. Ser. II, Mathematics, physics and chemistry, ISSN 1568-2609 ; 220). - URL: http://dx.doi.org/10.1007/1-4020-4367-8. - ISBN 978-1-4020-4366-6.

ГРНТИ	УДК
47.33	621.382.004.6

Рубрики:
Полупроводниковые приборы -- Дефекты

Доп. точки доступа:
Gusev, E.\ed.\
SpringerLink (Online service)
Экз-ры полностью 621.382.004.6/D30-567685
http://dx.doi.org/10.1007/1-4020-4367-8

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Тематический рубрикатор (ГРНТИ)7250

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