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6735e7e33893836be69d6664a5b6c1df/2002/15/3Журнал
Institute of Electrical and Electronics Engineers (New York,NY). IEEE Transactions on Semiconductor Manufacturing/ Institute of Electrical and Electronics Engineers (New York,NY), Institute of Electrical and Electronics Engineers (New York,NY). - New York, NY [etc.] ; IEEE , 1988. - . - URL: http://ieeexplore.ieee.org/servlet/opac?punumber=66, http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=66. - Загл. с титул. экрана. - ISSN 0894-6507. - Выходит ежеквартально. - Текст : электронный.
2002г.т.15 № 3 . - URL: http://ieeexplore.ieee.org/servlet/opac?punumber=66, http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=66. - Загл. с титул. экрана
IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1995г. 8 № 3.IEEE Transactions on Semiconductor Manufacturing / Institute of Electrical and Electronics Engineers (New York,NY), Institute of Electrical and Electronics Engineers (New York,NY). - Журнал выходит с 1988г. r=on-line. - Текст : электронный.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1994г. 7 № 1.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1994г. 7 № 3.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 2001г. т. 14 № 2.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1995г. 8 № 1.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 2001г. т. 14 № 4.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1995г. 8 № 2.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1995г. 8 № 4.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1999г. т. 12 № 1.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1999г. т. 12 № 2.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1998г. т. 11 № 3.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 2002г. т. 15 № 1.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 2002г. т. 15 № 2.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 2001г. т. 14 № 1.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 2002г. т. 15 № 3.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1998г. т. 11 № 4.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1998г. т. 11 № 2.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1996г. 9 № 2.IEEE Transactions on Semiconductor Manufacturing. - Журнал, 1996г. 9 № 1.
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