Полное описание

Design and Manufacturing of Active Microsystems / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. - Electronic text data. - Berlin ; Heidelberg : Springer Berlin Heidelberg, 2011. - (Microtechnology and MEMS, ISSN 1615-8326). - URL: http://dx.doi.org/10.1007/978-3-642-12903-2. - Загл. с экрана. - ISBN 978-3-642-12903-2. - DOI 10.1007/978-3-642-12903-2. - Текст : электронный.
Содержание:
1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.

ГРНТИ	УДК
47.13.11	621-181.4

Рубрики:
engineering
nanotechnology
mechatronics
industrial engineering
engineering
nanotechnology and Microengineering
mechatronics
operating Procedures, Materials Treatment
nanotechnology

Аннотация: This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Доп. точки доступа:
Büttgenbach, S.\editor.\
Burisch, A.\editor.\
Hesselbach, J.\editor.\

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