Fruhauf J. Shape and functional elements of the bulk silicon microtechnique : a man. of wet-etched silicon structures / J. Fruhauf, 2005. - XII, 221 p. с. - Текст : непосредственный.
Fruhauf J. Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures / J. Fruhauf, 2005 r=on-line. - Текст : электронный.