Selected papers from the nanoscale imaging, fabrication and materials modification using ion beams symposium - ICMAT 2011 : and selected papers from the 2011 13th SEMATECH surface preparation and cleaning conference, Austin, Tx, Mar. 21-23, 2011 / Ed.: J. van Kan, A. Bettiol, 2013. - 105 p. - Текст : непосредственный.